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Multiple Defect pattern Recognition in a Wafer Map Using Vector-Representation Based Capsule Network
Misun Kim Ji Hwan Choi Harim Lee
Vol. 48, No. 9, pp. 1179-1189, Sep. 2023
10.7840/kics.2023.48.9.1179
Vol. 48, No. 9, pp. 1179-1189, Sep. 2023
10.7840/kics.2023.48.9.1179
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